Probe of the vicinal Si (111) surface by second harmonic phase spectroscopy

Authors
Schuhmacher, D Marowsky, G Fedyanin, AA Dolgova, TV Aktsipetrov, OA
Citation
D. Schuhmacher et al., Probe of the vicinal Si (111) surface by second harmonic phase spectroscopy, MAT SC S PR, 4(1-3), 2001, pp. 51-53
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
ISSN journal
13698001 → ACNP
Volume
4
Issue
1-3
Year of publication
2001
Pages
51 - 53
Database
ISI
SICI code
1369-8001(200102/06)4:1-3<51:POTVS(>2.0.ZU;2-6
Abstract
The intrinsic surface sensitive technique of optical second harmonic (SH) p hase and intensity measurements is used to probe a slightly miscut natively oxidized Si(1 1 1) surface. The experiments have been performed in a spect ral interval covering the E-2 resonance of silicon band structure. The phas e and intensity of the SH wave measured at several azimuthal angular positi ons allow to separate the vicinal contributions. (C) 2001 Elsevier Science Ltd. All rights reserved.