In this paper we show that single-photon avalanche detectors (SPADs) may ha
ve a strong potential as very sensitive on-wafer tools for Lifetime monitor
ing, given their simple fabrication process and their straightforward use i
n the measurements. We have fabricated Si SPADs with n(+)-p structures and
we show that dark counting has a simple exponential dependence on time, thu
s making it possible to extract a single lifetime parameter. (C) 2001 Elsev
ier Science Ltd. All rights reserved.