A four-port microwave measurement system to speed on-wafer calibration andtest

A four-port measurement systems comprising an inexpensive coaxial switch ma trix and a comprehensive free software packages extends the capabilities of a user's two-port automatic network analyzer and probe station to three- a nd four-port measurements. The software includes routines for calibration, measurement and correction, and generates normal and differential scatterin g and impedance parameters in a variety of standards data formats. Any in-l ine, two-port calibration, including the multiline thru-reflect-line method , may be used to correct the measurement data.