Novel optical sensor for the measurement of surface texture

In this article we describe a novel optical sensor designed to measure surf ace texture, i.e., the roughness and waviness. The system integrates a surf ace profiler and a light scattering unit in a compact setup suitable for in dustrial applications. This sensor could represent a unique surface inspect ion tool to be integrated in grinding stations used for reconditioning roll s for milling. The spatial wavelength measuring range for waviness is 1-100 mm, whereas the amplitudes of the measured defects can be in the range 200 nm-5 mum for waviness and 100 nm-1.5 mum for roughness. The system exhibit s a measurement uncertainty of less than 2% of the measuring range. The ind ustrial version of the sensor has been realized and characterized in field. (C) 2001 American Institute of Physics.