Using FIB-processed AFM cantilevers to determine microtribology characteristics

Microtribology characteristics were determined by using a combination of si ngle asperities and three types of FIB (focused ion beam)-processed cantile vers for AFM (atomic force microscope). First, single gold asperities were rubbed with single and parallel leaf springs. For the parallel leaf spring, the pull-off force was proportional to the worn area of the gold asperity peak. The total volume of the gold asperity only slightly changed with rubb ing. Second, the friction force on a worn asperity was measured by using a double parallel leaf spring, and the results showed that the friction force was proportional to the sum of the normal load and the pull-off force.