Infrared responsivity of uncooled VO2-based thin films bolometer

VO2 thin films are used for uncooled microbolometer due to their high tempe rature coefficient of resistance. In this paper,on the basis of fabricating the uncooled bolometer based on VO2 sputtered thin films, the responsivity for the spectral range of 8 - 12 mum region dependence on bias current and chopper frequency is studied. The result indicates that the responsivity i s over 17kV/W and up to 10kV/W at a chopper frequency of 10 and 30Hz, respe ctively. The device having a detectivity D* of exceeding 1.0 x 10(8) cm roo t Hz/W and a thermal time constant of 0.011 seconds has been realized.