Surface stoichiometry of manganin coatings prepared by pulsed laser deposition as described by laser-induced breakdown spectrometry

The use of laser-induced breakdown spectrometry (LIBS) for the multielement al distribution of coating samples is discussed. Surface characterization,v as performed by monitoring plasma emission generated by a Q-switched Nd:YAG laser operating on the second harmonic wavelength at 532 nm, Samples anwal yzed by LIES consisted of manganin coatings (Cu, Ni, and Mn) prepared on Si by pulsed laser deposition from a solid manganin target (Cu 86%, Ni 2%, Mn 12%), The thickness of the coating was similar to 50 nm. To improve both s urface sensitivity and spectral detection, the laser beam was focused 5 mm above the sample surface. A total area crf 5.6 mm x 3.5 mm was sampled with a lateral resolution of 375 mum. For quantitative purposes, the data from the coated sample were compared with those obtained:from a manganin standar d. Significant differences in the stoichiometry of coatings as compared wit h the original sample were observed.