Au/AuBe and Au/AuBe/Cr contacts have been deposited onto the surface of p-Z
nTe. It a as found that with a proper choice of Cr thickness, a low specifi
c contact resistance of 2.0 x 10 (6)Omega cm(2) can be achieved for Au/AuBe
/Cr on p-ZnTe. It was also Found that Zn outdiffusion will significantly de
grade the electrical properties of the Au/AuBe contact on p-ZnTe when annea
ling temperature is above 300 degreesC. Conversely. Au/AuBe/Cr contact is m
ore thermally reliable. Such a property makes Au/AuBe/Cr attractive in devi
ce application.