Development of an ion micro-beam facility at Institute of Physics, Bhubaneswar

An ion micro-beam facility has been set up at one of the beam lines of the 3MV tandem Pelletron accelerator facility at IOP, Bhubaneswar. This is the first facility of its kind in the country having potential applications in the growing fields involving semiconductors, materials: science, biology, a rcheology and environmental science, from both scientific and industrial po int of view. So far we have achieved a spatial resolution of 4 mum. A brief description of the experimental set-up, is given. Elemental maps, obtained by RBS measurements on a transmission electron microscope grid and on epit axial gold-silicide islands grown on Si(110) surfaces, are presented.