The small signal dielectric properties (epsilon, tan delta) of ceramic (Ba,
Sr)TiO3 (BSTO) films in the frequency range (1-30) GHz we're under investig
ation. The Q-factor and tunability were measured for planar BSTO ceramic va
ractors and are presented in comparison with similar parameters for semicon
ductor varactors. To illustrate the possibility of the use of BSTO ceramic
films at 30 GHz, a phase shifter based on grounded coplanar waveguide (CWG)
has been designed and experimentally tested. The device demonstrated phase
shift up to Delta phi = 370 degrees under the bias voltage (0-350) V and i
nsertion loss L = (4-6) dB in all range of bias voltages.