Life cycle testing of BaxSr1-xTiO3 ferroelectric thin films in a tunable microwave device

Thin film ferroelectrics are being studied as candidates for novel tunable microwave components such as tunable filters, tunable oscillators, and phas e shifters for applications in phased array antennas. Much work has been do ne optimizing the ferroelectric material and in producing proof-of-concepts of these components. However, little attention has been given to their rel iability. In this study we present our results on the reliability of high q uality K-band phase shifters made of BaxSr1-xTiO3 (BSTO) ferroelectric thin films (0.5-0.75 mum thick) on MgO and LAG. The phase shift and insertion l oss were measured at 300 K over 10(4) operation cycles within a 0-400 V de bias range (0-40 V/mum) at 15, 18, and 22 GHz. Results for these phase shif ters indicate that in general there were no appreciable changes in phase sh ift after 4x10(4) cycles, suggesting that these phase shifters are robust e nough to sustain optimal performance under the operating mode typical of fa st tracking phased arrays.