Ferroelectric thin films of BaTiO3 were prepared by a sol-gel technique on
ITO-glass substrates and annealed at 650 degreesC for 30 seconds in a rapid
thermal processor (RTP) with O(2)atmosphere. X-ray diffraction (XRD), atom
ic force microscopy (AFM) and transmission spectroscopy were used to study
the surface morphology and the microstructure of the films, and the results
showed that the films were well crystallized. crack-free. smooth, and high
ly transparent in the visible-near infrared spectral zone. The ferroelectri
c properties of the films have been studied. A butterfly CV loop was observ
ed and a remnant polarization of P-r=6.3 mu C/cm(2) and a coercive field of
E-c=8.4 kV/cm were determined from the ferroelectric hysteresis loop.