Influence of the measurement parameters on the reliability of ferroelectric thin films

Authors
Grossmann, M Lohse, O Bolten, D Boettger, U Waser, R Tiedke, S Schmitz, T Kall, U Kastner, M Schindler, G Hartner, W
Citation
M. Grossmann et al., Influence of the measurement parameters on the reliability of ferroelectric thin films, INTEGR FERR, 32(1-4), 2001, pp. 693-701
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Eletrical & Eletronics Engineeing
Journal title
INTEGRATED FERROELECTRICS
ISSN journal
10584587 → ACNP
Volume
32
Issue
1-4
Year of publication
2001
Pages
693 - 701
Database
ISI
SICI code
1058-4587(2001)32:1-4<693:IOTMPO>2.0.ZU;2-L
Abstract
The fatigue behavior of PZT thin films was investigated. The fatigue excita tion signal was changed with respect to the shape, the amplitude, and the f requency of the signal. It is shown that the fatigue excitation signal has a strong influence on the fatigue behavior of the films. Additionally, elec trical characterization of a single 1 mum(2) SBT capacitor is reported.