I. Stolichnov et al., Constant-current study of dielectric breakdown of Pb(Zr,Ti)O-3 ferroelectric film capacitors, INTEGR FERR, 32(1-4), 2001, pp. 737-746
This paper addresses the problem of time-dependent dielectric breakdown of
Pb(Zr,Ti)O-3 (PZT) thin films. It is shown by using constant-current breakd
own measurements, that for PZT film capacitors with Pt and SrRuO3 (SRO) ele
ctrodes the breakdown onset is controlled by charge to breakdown (Q(BR)) ra
ther than the voltage applied to the capacitor. The QBR value for the asymm
etrical Pt/SrRuO3/PZT/Pt capacitors is found to be much higher that for the
Pt/PZT/Pt system. Polarization fatigue caused by bipolar voltage stress pr
ovokes a substantial decrease in charge to breakdown. These results can be
interpreted in terms of percolation model used for breakdown in SiO2, where
the QBR is associated with injected-carrier-assisted creation of the criti
cal concentration of defects required for formation of the breakdown paths.
The observed variation of the QBR values depending on the electrode materi
al (i) and polarization fatigue (ii) are interpreted in terms of current re
distribution across the area of the capacitor, specifically current redistr
ibution between grains and grain boundaries (case (i)) or current redistrib
ution between fatigued and nonfatigued areas (case(ii)).