Processing and properties of nanocrystalline Pb(Sc0.5Ta0.5)O-3, Pb(Sc0.5Nb0.5)O-3 and Pb(Mg1/3Nb2/3)O-3 films produced by RF-sputtering from ceramic targets

Citation
C. Ziebert et al., Processing and properties of nanocrystalline Pb(Sc0.5Ta0.5)O-3, Pb(Sc0.5Nb0.5)O-3 and Pb(Mg1/3Nb2/3)O-3 films produced by RF-sputtering from ceramic targets, INTEGR FERR, 31(1-4), 2000, pp. 183-193
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Eletrical & Eletronics Engineeing
Journal title
INTEGRATED FERROELECTRICS
ISSN journal
10584587 → ACNP
Volume
31
Issue
1-4
Year of publication
2000
Pages
183 - 193
Database
ISI
SICI code
1058-4587(2000)31:1-4<183:PAPONP>2.0.ZU;2-S
Abstract
Nanocrystalline thin films of different relaxer materials, namely Pb(Sc0.5T 0.5)O-3 (PST), Pb(Sc0.5Nb0.5)O-3(PSN), Pb(Mg1/3Nb2/3)O-3(PMN) have been pro duced by RF-sputtering to investigate whether it will affect their dielectr ic properties if their grain size is reduced to the dimensions known from t heir nanodomains. The XRD shows that the amorphous film crystallizes in pyr ochlore structure at lower temperatures and short times. Annealing at highe r temperatures and far longer time intervals leads to an increasing amount of perovskite phase with a grain size in the nanometer range. These results including dielectric measurements will be presented and discussed.