Processing and properties of nanocrystalline Pb(Sc0.5Ta0.5)O-3, Pb(Sc0.5Nb0.5)O-3 and Pb(Mg1/3Nb2/3)O-3 films produced by RF-sputtering from ceramic targets
C. Ziebert et al., Processing and properties of nanocrystalline Pb(Sc0.5Ta0.5)O-3, Pb(Sc0.5Nb0.5)O-3 and Pb(Mg1/3Nb2/3)O-3 films produced by RF-sputtering from ceramic targets, INTEGR FERR, 31(1-4), 2000, pp. 183-193
Nanocrystalline thin films of different relaxer materials, namely Pb(Sc0.5T
0.5)O-3 (PST), Pb(Sc0.5Nb0.5)O-3(PSN), Pb(Mg1/3Nb2/3)O-3(PMN) have been pro
duced by RF-sputtering to investigate whether it will affect their dielectr
ic properties if their grain size is reduced to the dimensions known from t
heir nanodomains. The XRD shows that the amorphous film crystallizes in pyr
ochlore structure at lower temperatures and short times. Annealing at highe
r temperatures and far longer time intervals leads to an increasing amount
of perovskite phase with a grain size in the nanometer range. These results
including dielectric measurements will be presented and discussed.