PECULIARITIES OF MOLYBDENUM AMORPHIZATION DURING ION SILICON IMPLANTATION

Authors
TYUMENTSEV AN KOROTAYEV AD PINZHIN YP SAFAROV AF PANIN OV BUGAYEV SP SHANIN PM
Citation
An. Tyumentsev et al., PECULIARITIES OF MOLYBDENUM AMORPHIZATION DURING ION SILICON IMPLANTATION, Fizika metallov i metallovedenie, 83(5), 1997, pp. 80-90
Citations number
15
Categorie Soggetti
Metallurgy & Metallurigical Engineering
Journal title
Fizika metallov i metallovedenie → ACNP
ISSN journal
00153230
Volume
83
Issue
5
Year of publication
1997
Pages
80 - 90
Database
ISI
SICI code
0015-3230(1997)83:5<80:POMADI>2.0.ZU;2-L