A new organic modifier for anti-stiction

The chemical and mechanical characteristics of a new surface modifier, dial kyldichloromethylsilane (DDMS, CH3)(2)SiCl2), for stiction-free polysilicon surfaces are reported, The main strategy is to replace the conventional mo noalkyl-trichlorosilane (MTS, RSiCl3) such as octadecyltrichlorosilane (ODT S) or 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS),vith dichlorodisilan e (DDS, R2SiCl2) with two short chains, especially DDMS. DDMS, with shorter chains in aprotic media, rapidly deposits on the chemically oxidized polys ilicon surface at room temperature and successfully prevents long cantileve rs 3 mm in length from in-use as well as release stiction, DDMS-modified po lysilicon surfaces exhibit satisfactory hydrophobicity, long term stability and thermal stability, which are comparable to those of FDTS, DDMS as an a lternative to FDTS and ODTS provides a few valuable advantages; ease in han dling and storage of the solution, low temperature-dependence and low cost, In addition to the new modifier molecule, the simplified process of direct release right after washing the modified surface with isooctane was propos ed to cut the processing time.