Analysis of the dynamics in microactuators using high-speed cine photomicrography

This paper discusses the visualization of microdevice dynamic. using high-s peed cine photomicrograph, The visualization results in image sequences, wh ich contain the kinematic position data of the moving parts in a microsyste m. Utilizing a mathematical model, it is shown in this paper how to extract information about the forces and torques acting on the microdevice, Furthe rmore, the values of system parameters can be calculated if a dynamic model of the process is available and the identification of the parameters is un ambiguous. In this paper, the model-based evaluation of high-speed-cinemato graphic image sequences is demonstrated for a microturbine and a microrelay . The measurements on the microturbine have been performed with a setup, wh ich allows an image frequency up to 100 million frames per second for nonre producible processes. The measurements of the microrelay have been taken wi th a second experimental setup using the stroboscopic principle, In the cas e of the microrelay, the complete identification of the dynamic model used by us is carried out. A first application of our identified model is the de sign of an optimal current pulse for the microrelay to damp oscillations.