Analysis of errors in the photometric monitoring of layer thickness

Authors
Vol'pyan, OD Yakovlev, PP Meshkov, BB
Citation
Od. Vol'Pyan et al., Analysis of errors in the photometric monitoring of layer thickness, J OPT TECH, 68(3), 2001, pp. 225-226
Citations number
5
Categorie Soggetti
Optics & Acoustics
Journal title
JOURNAL OF OPTICAL TECHNOLOGY
ISSN journal
10709762 → ACNP
Volume
68
Issue
3
Year of publication
2001
Pages
225 - 226
Database
ISI
SICI code
1070-9762(200103)68:3<225:AOEITP>2.0.ZU;2-Q
Abstract
This paper uses the method of reverse synthesis to analyze the error distri bution in the layer thickness of quarter-wave coatings obtained using photo metric monitoring. Results of the modelling of the operation of photometric monitoring are presented. (C) 2001 The Optical Society of America.