Chemical nucleation for CVD diamond growth

Citation
A. Giraud et al., Chemical nucleation for CVD diamond growth, J AM CHEM S, 123(10), 2001, pp. 2271-2274
Citations number
51
Categorie Soggetti
Chemistry & Analysis",Chemistry
Journal title
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
ISSN journal
00027863 → ACNP
Volume
123
Issue
10
Year of publication
2001
Pages
2271 - 2274
Database
ISI
SICI code
0002-7863(20010314)123:10<2271:CNFCDG>2.0.ZU;2-P
Abstract
A new nucleation method to form diamond by chemically pretreating silicon ( Ill)surfaces is reported. The nucleation consists of binding covalently 2,2 -divinyladamantane molecules on the silicon substrate. Then low-pressure di amond growth was performed for 2 h via microwave plasma CVD in a tubular de position system. The resulting diamond layers presented a good cristallinit y and the Raman spectra showed a single very sharp peak at 1331 cm(-1), ind icating high-quality diamonds.