Comparison of pulsed laser deposition CNx films grown from organic and inorganic targets

A comparative study of CNx films grown by pulsed laser ablation from organi c and inorganic targets has been reported. An ArF excimer laser (193 nm) wa s used to ablate pure glassy graphite (>99, 95%) and guanazole (3,5 diamino 1,2,4 triazol) targets in a reactive atmosphere of ammonia. Changes in thi ckness and properties of the CNx films were studied by profilometry, Fourie r transform infrared and energy dispersive x-ray spectroscopies. Additional information on the film bonding configuration was obtained by a controlled thermal effusion system. The role of the target materials on the CNx film growth rate, composition and bonding configuration was investigated. We fin d that the ablation of organic targets in a NH3 atmosphere leads to films w ith nitrogen content near to stoichiometric values (57 at.%) and a wider va riety of carbon-nitrogen bonds. Also, the formation of C-N single bonds is promoted and the thermal desorption spectra give interesting information ab out film structural changes. Finally, the thermal stability of the films gr own from both compounds is discussed. (C) 2001 American Vacuum Society.