Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

Authors
Takashima, S Arai, S Hori, M Goto, T Kono, A Ito, M Yoneda, K
Citation
S. Takashima et al., Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas, J VAC SCI A, 19(2), 2001, pp. 599-602
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
19
Issue
2
Year of publication
2001
Pages
599 - 602
Database
ISI
SICI code
0734-2101(200103/04)19:2<599:DOVUAS>2.0.ZU;2-X
Abstract
We have developed a vacuum ultraviolet absorption spectroscopy (VUVAS) tech nique employing a high-pressure nitrogen molecule (N-2) microdischarge holl ow cathode lamp (N-2 MHCL) as a light source of the atomic nitrogen (N) res onance Lines for measuring absolute N densities in process plasmas. The est imations of self-absorption and the emission line profiles of the N-2 MHCL, which are necessary for absolute N density determination, were carried out . The measurement of absolute N densities have been demonstrated for an ind uctively coupled N-2 plasma using the VUVAS system employing the N2MHCL. (C ) 2001 American Vacuum Society.