Microstructure and tribological performance of MoSx/Au co-sputtered composites

Co-sputtered thin films of MoSx with Au have been deposited in order to inv estigate the relationships between tribological behavior and film microstru cture. The mechanical properties of the composite films were investigated b y pin-on-disk wear testing in 50% relative humidity air as a function of Au concentration. X-ray diffraction measurements indicate that the microstruc ture is strongly affected by the inclusion of Au and that there is a strong correlation between microstructure and tribological performance. (C) 2001 American Vacuum Society.