Silicon bonding for ultrahigh vaccuum surface science studies

Citation
S. Gokhale et al., Silicon bonding for ultrahigh vaccuum surface science studies, J VAC SCI A, 19(2), 2001, pp. 706-708
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
19
Issue
2
Year of publication
2001
Pages
706 - 708
Database
ISI
SICI code
0734-2101(200103/04)19:2<706:SBFUVS>2.0.ZU;2-6
Abstract
A novel silicon bonding technique and its application for surface science s tudies in a wide temperature range of 30-1400 K is presented. The silicon s ingle crystal is bonded on a polished tantalum plate via thin silver and tu ngsten interlayers deposited by evaporation in high vacuum. Upon annealing the silicon sample is bonded with a strong mechanical and good thermal cont act. Several problems common to alternative sample mounting techniques an s olved by this procedure. Excellent temperature control and small temperatur e gradients across the surface well below 1 K are demonstrated by thermal d esorption data for two different adsorbates: ethane and hydrogen on Si(001) -(2x1). (C) 2001 American Vacuum Society.