The MESA. process for building silicon diodes is described. I-V and C-V fea
tures of MESA detectors are given. Results of pulse-height spectra measurem
ents with alpha particles incident on the front and back sides of a MESA di
ode establish the energy resolution of these detectors, show the evolution
of their response as a function of applied bias voltage, and bring informat
ion about the influence of MESA structure on charge collection. The charact
eristics of MESA detectors as a function of fluence are investigated in vie
w of their possible use in high particle fluence environment. Charge collec
tion data obtained from the measurements of the current-pulse response indu
ced by beta and alpha particles are presented as a function of applied bias
voltage and particle fluence. Some electrical characteristics of detector
material, namely the effective impurity or dopant concentrations (N-eff), t
he electron (mu (e)) and hole (mu (h)) mobilities, are studied as a functio
n of fluence using a charge transport model. A comparison is made with the
features of standard planar (SP) silicon detectors. (C) 2001 Elsevier Scien
ce B.V. All rights reserved.