Vacuum-deposited copper phthalocyanine (CuPc) film was bombarded by a low-e
nergy argon ion (Ar+) beam. The surface changes induced were studied in det
ail using X-ray photoelectron spectroscopy. It shows that even if the ion e
nergy is as low as 100 eV, the surface of the CuPc film undergoes severe st
ructural changes. Ring rupture was clearly observed after only several minu
tes of ion bombardment. In addition, the original Cu(II) in CuPc was found
reduced to Cu(I) and present with the residues of the damaged ring. The for
mation of this thin Cu(I) containing layer could significantly affect the o
verall properties of the CuPc film as an organic functional layer. (C) 2001
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