Alkoxy (isocyanato) silanes were synthesized by the reaction of tri- o
r tetraisacyanatosilane with ethanol, isopropyl alcohol, or t-butyl al
cohol. Due to the milder reactivity of the isocyanatosilanes compared
with that of the corresponding chlorosilanes, the substitution reactio
n was easily controlled by proper molar ratio and use of bulky alcohol
with an appropriate catalyst. As a result, alkoxy(isocyanato) silanes
were prepared and isolated by distillation in high yields.