The temperature dependent morphological evolution of Pt(111) under 1 keV Xe
+ normal incidence ion bombardment has been investigated up to 600 monolaye
rs removed. Coarsening of the surface structures during erosion and a quali
tative change in roughness evolution between 650 and 700 K are found to be
caused by different atomic processes: the former by diffusion of atoms alon
g steps, the latter by the onset of step atom detachment.