Low-loss polymeric optical waveguides using electron-beam direct writing

Low-loss optical waveguides based on a negative tone epoxy Novolak resin po lymer have been fabricated using electron-beam direct writing. This polymer has a high refractive index, high sensitivity, large hardness, and T-g> 20 0 degreesC. For single-mode channel waveguides with upper claddings, the pr opagation losses measured were 0.22 and 0.48 dB/cm at 1330 and 1550 nm, res pectively. For waveguides without upper claddings, the losses were 0.5 dB/c m at both wavelengths. The stability of these waveguides was also investiga ted, and no significant change was observed after 200 h at 90 degreesC and 95% relative humidity. (C) 2001 American Institute of Physics.