We fabricate density-modulated two-dimensional electron systems by shallow
compensation doping the donor layer of a modulation-doped heterostructure.
Zinc acceptor atoms are diffused from the sample surface which is heated by
a focused laser beam. Low-temperature magnetotransport experiments provide
evidence that high-quality lateral surface superlattices can be fabricated
. In weak periodic one-dimensional potentials, commensurability oscillation
s are recovered, whereas in strong periodic two-dimensional potentials the
semiclassically expected antidot resistance resonances are found to dominat
e the low-field transport. Additionally, the homogeneity of the laser-induc
ed doping is confirmed by magnetic focusing experiments. (C) 2001 American
Institute of Physics.