We propose a low-resistivity metal/Si/DySi2/Si multilayer Ohmic contact to
n-type Si. For a DySi2 monolayer on n-type Si(111), the Fermi level has bee
n found to be located only 0.08 eV below the conduction-band minimum of Si,
corresponding to flatband conditions. Here, we demonstrate that this Fermi
-level position is conserved to a large extent upon Si overgrowth of the mo
nolayer, allowing us to exploit the flatband conditions for device applicat
ions under ambient conditions. (C) 2001 American Institute of Physics.