The oxide breakdown properties of ultra-thin (similar to1 nm), naturally ox
idised Al2O3 tunnel barriers in magnetic tunnel junctions were studied usin
g ramped and constant stress experiments. During stress measurements at 1.3
5V, a fast breakdown of the junction was observed. The time-to-breakdown is
evaluated using Weibull statistics. as commonly utilised in SiO2 reliabili
ty studies.