The peel strength and peel angle of Cr/BPDA-PDA interfaces were measured us
ing the T-peel rest for Cu/Cr/BPDA-PDA structures, When the Cu/Cr metal fil
m war thin, plastic bending of the metal film occurred during the T-peel te
st, With a thicker metal film, however. plastic bending of BPDA-PDA polyimi
de was observed. The critical thickness of the metal film for the transitio
n from metal film bending to polyimide bending became thinner M with decrea
sing yield strength of the metal film, Regardless of the metal film bending
or polyimide bending during the T-peel rest, the peel strength increased w
ith higher peel angle and the failure mode or the Cr/BPDA-PDA interfaces wa
s cohesive failure within BPDA-PDA.