Electrostatic probe diagnostics of a planar-type radio-frequency inductively coupled oxygen plasma

An inductively coupled oxygen radio-frequency (13.56 MHz) discharge is inve stigated based on modeling and experiment. Experimental measurement is done at a range of gas pressure of 1-30 mTorr, and rf power of 100-1000 W. We m easure most of the important plasma parameters such as the densities of cha rged species, electron temperature, plasma potential, and electron energy d istribution function. The measured values are compared with the results of the spatially averaged global model. We observe a generally good agreement between the modeling and the experiment. The scaling features, the transiti on of the operating region, and the radial distributions of charged species are also discussed. (C) 2001 American Institute of Physics.