We report the observation of visible cathodoluminescence (CL) from AlN thin
films grown on sapphire (0001) substrate by molecular beam epitaxy and dop
ed by implantation with Eu3+ and Tb3+ ions. The strongest rare earth (RE) C
L was observed from samples annealed at 1100 degreesC for 0.5 h in N-2 ambi
ent. The sharp characteristic emission lines corresponding to Eu3+ and Tb3 intra-4f(n) shell transitions are resolved in the spectral range from 350
to 900 nm. The CL spectra were recorded over 1-16 keV electron energy in th
e temperature range of 8-330 K. The depth resolved CL spectral analysis giv
es the luminescence surface a dead layer thickness of similar to 16 nm for
implanted AlN samples. We observed several different recombination centers
luminescing in the 286-480 nm spectral region due to the presence of struct
ural defects and oxygen impurities. The time resolved spectra and the CL ki
netics were studied. The decay times for D-5(0)--> F-7(2) (Eu3+), D-5(3)-->
F-7(5) (Tb3+), and D-5(4)--> F-7(6) (Tb3+) transitions at 300 K are simila
r to0.4, similar to0.9, and similar to0.4 ms, respectively. We also discuss
possible excitation mechanisms of RE ions in AlN. (C) 2001 American Instit
ute of Physics.