Recent developments in scanning Auger microscopy (SAM) are described. Empha
sis is given to a method of parallel acquisition of the electron energy spe
ctra and the benefits of spectrum-imaging for which it is capable of perfor
ming. In view of the maturity of the field of SAM, motivations and prospect
s for further developments are discussed. (C) 2001 Elsevier Science B.V. Al
l rights reserved.