Ultra-fine machining tool/molds by LIGA technology

Machining tools based on the excimer laser and x-ray lithography to make ul tra-fine machining tool/molds are described in this paper. The lower high-a spect ratio resist molds are fabricated using the KrF excimer laser. The hi gher aspect-ratio resist molds are made using x-ray lithography. Both low a nd high aspect-ratio resist molds are then converted into metallic structur es using electroforming, The NiCo/SiC microcomposite electroforming with lo w internal stress (similar to0 kg mm(-2)) and high hardness (>Hv500) shows its feasibility as mold materials. An example of 2 mm thick integrated circ uit. (IC) packaging leadframe patterns using x-ray micromachining is illust rated to prove its feasible application. On the technical side, micro-struc tures with a high aspect ratio of 30 were developed using a graphite membra ne based x-ray mask.