Machining tools based on the excimer laser and x-ray lithography to make ul
tra-fine machining tool/molds are described in this paper. The lower high-a
spect ratio resist molds are fabricated using the KrF excimer laser. The hi
gher aspect-ratio resist molds are made using x-ray lithography. Both low a
nd high aspect-ratio resist molds are then converted into metallic structur
es using electroforming, The NiCo/SiC microcomposite electroforming with lo
w internal stress (similar to0 kg mm(-2)) and high hardness (>Hv500) shows
its feasibility as mold materials. An example of 2 mm thick integrated circ
uit. (IC) packaging leadframe patterns using x-ray micromachining is illust
rated to prove its feasible application. On the technical side, micro-struc
tures with a high aspect ratio of 30 were developed using a graphite membra
ne based x-ray mask.