Analysis and testing of a fluidic vortex microdiode

Citation
M. Anduze et al., Analysis and testing of a fluidic vortex microdiode, J MICROM M, 11(2), 2001, pp. 108-112
Citations number
9
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN journal
09601317 → ACNP
Volume
11
Issue
2
Year of publication
2001
Pages
108 - 112
Database
ISI
SICI code
0960-1317(200103)11:2<108:AATOAF>2.0.ZU;2-D
Abstract
A new design of fluidic microdiode is proposed. An initial numerical simula tion of this so-called vortex microdiode allows us to understand the workin g principle of the diode. It is shown that the complex relationship between the inertial and viscous effects may lead to paradoxical results: as an ex ample, an increase in the viscosity can involve an increase in the flow rat e. The simulated performances, confirmed by experimental measurements with a microdiode etched by deep reactive ion etching on a silicon wafer, are co mpared to the performances of other microdiodes described in the literature . The efficiency of the vortex microdiode is found to be comparable to that of the Tesla microdiode, which was the most efficient microdiode. This is very encouraging, all the more so since the optimization perspectives are v aried, due to a sophisticated design.