On the out-of-plane deformation of V-shaped micromachined beams

V-shaped beams are widely applied for the suspension of the sensors, fiber holders, and the suspension arms of atomic force microscopes. The performan ce of the V-shaped beam is highly dependent upon its initial out-of-plane d eflection. This paper reports on the exploration of the out-of-plane deform ation of V-shaped micromachined beams. A finite element model has been esta blished to predict the deformation of a V-shaped micromachined beam. The fa brication and characterization of various shapes of SiO2 V-shaped micromach ined beams has been performed to observe the out-of-plane deformation cause d by residual stress. With the difference between the analytical and experi mental results, an etching process dependent mechanism has been discussed. Thus the design criteria to fabricate a flat V-shaped beam is accomplished.