Liquid metal ion source-produced germanium ions for maskless ion implantation (vol 34, pg L11, 2001)

Authors
Ganetsos, T Aidinis, C Bischoff, L Mair, GLR Teichert, J Panknin, D Papadopoulos, I
Citation
T. Ganetsos et al., Liquid metal ion source-produced germanium ions for maskless ion implantation (vol 34, pg L11, 2001), J PHYS D, 34(5), 2001, pp. 839-839
Citations number
1
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN journal
00223727 → ACNP
Volume
34
Issue
5
Year of publication
2001
Pages
839 - 839
Database
ISI
SICI code
0022-3727(20010307)34:5<839:LMISGI>2.0.ZU;2-N