EPR and UV-Raman study of BPSG thin films: structure and defects

Borophosphosilicate glass (BPSG) films produced by Sub-Atmospheric Pressure Chemical Vapor Deposition (SACVD) with different B and P concentrations ha ve been investigated by ultra-violet (UV) Raman and electron paramagnetic r esonance (EPR) spectroscopies. We observe a correlation between the main fe ature of the UV-Raman spectra in the as deposited films, the line at 1326(2 ) cm(-1) attributed to the stretching vibrations of the P=O double bond, an d the spin resonance signals attributed to the stable phosphorus-oxygen-hol e-center (POHC) created after room temperature X-ray irradiation. The inten sity of the P=O line as well as the intensity of the POHC EPR signal depend on the B content. The metastable configuration, POHCm, has been also obser ved by EPR. The B content does not affect significantly the concentration o f this paramagnetic defect. (C) 2001 Elsevier Science B.V. All rights reser ved.