Development of a fabrication technology for double-sided AC-coupled silicon microstrip detectors

Authors
Dalla Betta, GF Boscardin, M Bosisio, L Rachevskaia, I Zen, M Zorzi, N
Citation
Gf. Dalla Betta et al., Development of a fabrication technology for double-sided AC-coupled silicon microstrip detectors, NUCL INST A, 460(2-3), 2001, pp. 306-315
Citations number
12
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
460
Issue
2-3
Year of publication
2001
Pages
306 - 315
Database
ISI
SICI code
0168-9002(20010321)460:2-3<306:DOAFTF>2.0.ZU;2-K
Abstract
We report on the development of a fabrication technology for double-sided, AC-coupled silicon microstrip detectors for tracking applications. Two batc hes of detectors with good electrical figures and a low defect rate were su ccessfully manufactured at IRST Laboratory. The processing techniques and t he experimental results obtained from these detector prototypes are present ed and discussed. (C) 2001 Elsevier Science B.V. Ali rights reserved.