Theoretical analysis of distributions of the peak field and breakdown voltage along the metallurgical junction edge based on an elliptic cylindrical solution

The distributions of the peak electrical held at breakdown and breakdown vo ltage along the metallurgical junction edge of curved junction have been an alyzed theoretically in this paper for the first time. based on an elliptic al cylindrical geometrical approximation solution of the curved-abrupt junc tion. The effects of the ratio of lateral junction depth to that of the ver tical, normalized radius of curvature of the metallurgical junction and loc ation angle around the metallurgical junction edge on the distributions of the breakdown voltage and peak electrical field have been examined. In an e xtreme case, the elliptical -cylindrical solution reduces to the classic cy lindrical-symmetric solution. All analytical results have been well verifie d by the numerical analysis performed by the semiconductor device simulator DESSIS-ISE, showing the validity of the elliptic approximate solution of t he planar curved-abrupt junction. (C) 2001 Elsevier Science Ltd. All rights reserved.