Thin films of antimony-doped tin oxide have been obtained by a new techniqu
e, the so-called hydrolysis deposition method, in which hydrolyzed solids a
re precipitated from metal fluoride solutions. Mixed solutions of SnF3 and
SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of an
timony can be controlled in a wide range by adjusting the initial fluoride
concentrations of the solution. The Film containing 2.9 mol% antimony heate
d at 500 degreesC has an electrical resistivity of 1.0 x 10(-3) Omega .cm,
which is lower than previously obtained by wet-chemical techniques.