Synthesis and microstructural characterization of unsupported nanocrystalline zirconia thin films

A polymeric precursor spin-coating technique is illustrated in which yttriu m-stabilized zirconia (YSZ) thin films are produced on Si, Al2O3, and NaCl at temperatures less than 350 degreesC, High-resolution transmission electr on microscopy (HRTEM) examinations show that the YSZ films are nanocrystall ine (grain size of less than 5 nm), fully dense, and have a stabilized cubi c fluorite structure. Using the polymeric precursor spin coating method, un supported nanocrystalline thin films of YSZ with thicknesses ranging from 3 0 to 1000 nm are prepared by transferring the films from a host substrate t o metallic TEM grids with unsupported areas exceeding 1 mm(2).