Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering

Authors
Chen, M Pei, ZL Wang, X Sun, C Wen, LS
Citation
M. Chen et al., Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering, MATER LETT, 48(3-4), 2001, pp. 137-143
Citations number
25
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS LETTERS
ISSN journal
0167577X → ACNP
Volume
48
Issue
3-4
Year of publication
2001
Pages
137 - 143
Database
ISI
SICI code
0167-577X(200104)48:3-4<137:POZ:AF>2.0.ZU;2-D
Abstract
High preferred (002) orientation Al-doped ZnO (ZAO) films have been prepare d by de magnetron reactive sputtering of an alloy target (98.5 wt.% Zn-1.5 wt.% Al) onto polyester substrates. The structural, mechanical, electrical and optical properties were investigated. The ZAO film has a sheet resistan ce of as low as 47.5 Omega/square and an average visible transmittance of a bout 70%. An average IR reflectance of about 70% in the region of 2.5-25 mu m also has been obtained. (C) 2001 Elsevier Science B.V. All rights reserve d.