Effective methods to improve hardness and thickness uniformity in electrofo
rming for the LIGA process to produce metallic microstructures are describe
d. The result shows the internal stress of Ni-Co alloy deposit can be well
tuned between 2 to -2 kg/mm(2) by adding a stress release agent into the el
ectroplating bath. A secondary cathode is applied to improve the thickness
uniformity in electroforming without loss plating rate at the center of the
features.