Twenty-first century opportunities for GSI will be governed in part by a hi
erarchy of physical limits on interconnects whose levels are codified as fu
ndamental, material, device, circuit, and system. Fundamental limits are de
rived from the basic axioms of electromagnetic, communication. and thermody
namic theories, which immutably restrict interconnect performance, energy d
issipation, and noise reduction, At the material level, the conductor resis
tivity increases substantially in sub-50-nm technology due to scattering me
chanisms that are controlled by quantum mechanical phenomena and structural
/morphological effects. Ar the device and circuit level, interconnect scali
ng significantly increases interconnect crosstalk and latency. Reverse scal
ing of global interconnects causes inductance to influence on-chip intercon
nect transients such that even with ideal return paths, mutual inductance i
ncreases crosstalk by up to 60% over that predicted by conventional RC mode
ls. Ar the system level, the number of metal levels explodes for highly con
nected 2-D logic megacells that double in she every two years such that by
2014 the number is significantly larger than ITRS projections. This result
emphasizes that changes in design, technology and architecture are needed t
o cope with the onslaught of wiring demands. One potential solution is 3-D
integration of transistors, which is expected to significantly improve inte
rconnect performance. increasing the number of active layers, including the
use of separate layers for repeaters, and optimizing the wiring network, y
ields an improvement in interconnect performance of up to 145% at the 50-nm
node.