Lithography and patterning for nanostructure fabrication

Authors
Seebohm, G Craighead, HG
Citation
G. Seebohm et Hg. Craighead, Lithography and patterning for nanostructure fabrication, ELECTR MAT, 6, 2000, pp. 97-138
Categorie Soggetti
Current Book Contents","Current Book Contents
Journal title
QUANTUM SEMICONDUCTOR DEVICES AND TECHNOLOGIES → ACNP
Volume
6
Year of publication
2000
Pages
97 - 138
Database
ISI
SICI code