Nanotribology of carbon based thin films: the influence of film structure and surface morphology

The tribological behavior of carbon based thin films is strongly influenced by their chemical composition, polycrystalline structure and surface morph ology. We present friction measurements on laser deposited amorphous carbon and carbon nitride (CNchi) thin films using atomic force microscopy. We st udied the friction behavior of these films in relation with their structure and surface morphology resulting from the applied deposition parameters. W e found high nanoscopic friction for amorphous carbon thin films, medium fr iction for CN chi and very low friction for graphite. Finally we discuss ou r findings in terms of the microscopic mechanisms of energy dissipation und erlying the observed friction behavior. (C) 2001 Elsevier Science B.V. All rights reserved.